Straight (standard)

Angled (for polygon shaped transfer modules with two Load Locks next to each other)

Other (specify your requirements in 'your message' on the following page.)

One wafer (standard)

Two wafer

Other (specify your requirements in 'your message' on the following page.)

Aluminum EN AW-5083 (standard)

Other (specify your requirements in 'your message' on the following page.)

Semi standard cleaning in ISO 8 environment (standard)

High purity cleaning in ISO 6 environment

Other (specify your requirements in 'your message' on the following page.)

Rough vacuum (standard 1000-10^-3 mbar)

High vacuum (10^-4 - 10^-8 mbar)

07.0 ATM Door LINVAT (standard)

05.3 L-MOTION (high-end option, valve communality)

05.3 L-MOTION (standard)

Other (specify your requirements in 'your message' on the following page.)

FKM "Viton®" (standard)

Other (specify your requirements in 'your message' on the following page.)

FKM "Viton®" (standard)

Other (specify your requirements in 'your message' on the following page.)

29.0 (standard - for soft pump function)

26.4 (for grease free option in combination with orifice)

62.x (soft pump)

Other (specify your requirements in 'your message' on the following page.)

KF50 disc diffusor (standard)

None

Other (specify your requirements in 'your message' on the following page.)

Yes (standard)

None

Yes, 1x KF16 and 1x KF25 port (standard - 1x KF16 connection for pressure gauge, 1x KF25 for leak detector)

None

Other (specify your requirements in 'your message' on the following page.)

Lid interlock switch (standard)

None

Other (specify your requirements in 'your message' on the following page.)

Yes (standard)

None

Other (specify your requirements in 'your message' on the following page.)

None (standard)

Yes, via heating plate

Other (specify your requirements in 'your message' on the following page.)

None (standard)

Aluminum cooling plate suitable only for treated water

Aluminum cooling plate suitable also for facility water

Stainless steel cooling plate

Other (specify your requirements in 'your message' on the following page.)

None (standard)

Cooling line

Heater cartridges

Other (specify your requirements in 'your message' on the following page.)

Yes (standard)

None

Yes (standard)

None

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系列

双装载闸室

双装载闸室

Available options

Shape

Number of wafers per slit

Material

Cleanliness specification

Pressure range

ATM Door (LL to EFEM)

Transfer Valve (LL to VTM)

Static sealings material

Dynamic vulcanized sealings material

Pump valve for roughing

Venting

View port

Sensor port

Safety measures

Wafer fingers

Wafer heating

Wafer cooling

Chamber conditioning

Equalization valve

Over pressure valve