Reliable isolation with a soft touch

The 13.0 HV Isolation Valve with L-Gate has been specifically designed for electron gun isolation, for example, in electron microscopes. More broadly, it provides a suitable solution for applications requiring extremely low particle generation.

The series is designed for vacuum isolation at various pressure levels up to 1 × 10-9 mbar. The isolation function in this series is achieved through L-Gate technology, which incorporates a profile similar to the L-Motion profile. The technology provides reliable gate sealing without any friction, minimizing the risk of particle generation. Furthermore, the L-Gate technology enables a very gentle “soft-touch” closing. This soft-touch motion avoids any closing shock typically generated by standard valves when the gate touches the gate seat during the closing movement.

Another key feature is the vulcanized gate seal, which is a highly reliable and more durable sealing solution than a standard O-ring sealing. An additional benefit is its superior outgassing performance. Already installed in several demanding applications, 13.0 HV Isolation Valve with L-Gate has proven its outstanding reliability under various process conditions.

Various design options and customizations allow integration into different systems. Further material selection options enable this solution to meet a wide range of application requirements.

13.0 HV Isolation Valve with L-Gate
13.0 HV Isolation Valve with L-Gate

Closed
Closed

  1. Column
  2. Electron gun
  3. Electron beam
  4. Gate

Optically Closed
Optically Closed

Open
Open

The 13.0 HV Isolation Valve with L-Gate is available with single- or double-acting pneumatic actuation with solenoid valves, either as an onboard solution or for external mounting. Mechanical and / or electrical position indicators show the valve position.

The standard gate sealing material is vulcanized FKM. This prevents sticking and extends the service life. Other sealing materials are available on request.

13.0 HV Isolation Valve with L-Gate

Benefits:
  • Proven, reliable performance in HV / UHV conditions
  • Footprint-optimized design
  • Easy maintenance
  • Low cost of ownership
Features:

  • L-Gate technology to avoid any friction and minimize shock

  • Welded metal bellows sealed feedthrough

  • Extreme low particle count

  • 技术数据
Sizes   DN 6.3 mm (0.25"), DN 8 mm (0.31"), DN 10 mm (0.39"),
DN 12 mm (0.47"), DN 16 mm (0.63"), DN 63 mm (2½"),
DN 80 mm (3"), DN 100 mm (4"), DN 160 mm (6")
Actuators Pneumatic Single-acting with closing spring or double-acting
Body material   Aluminum
Feedthrough   Bellows
Standard flanges   Customized flange
Vacuum level   HV
Leak rate Valve body
Valve seat		 < 1 × 10-9 mbar ls-1
< 1 × 10-9 mbar ls-1
Pressure range   1 × 10-9 mbar to 1 bar (abs)
Differential pressure on the gate   ≤ 1.0 bar
Differential pressure at opening   ≤ 30 mbar1)
Cycles until first service Standard configuration
Customized configuration		 50 000
On request
Temperature2) Valve body
Actuator
Solenoid valve
Position indicator		 ≤ 120 °C
≤ 50 °C
≤ 50 °C
≤ 50 °C
Heating and cooling rate   ≤ 30 °C h-1
Material

Aluminum valve body
Arm
Gate
Bellows

 EN AW-5083 (3.3547)
AISI 316L (1.4435)
Titanium
AISI 316L (1.4435)
Seal Insert connection
Gate		 FKM
FKM
Mounting position   Any
Solenoid valve   24 VDC, 5.4 W (others on request)
Position indicator: contact rating   On request: depending on valve size
Valve position indication   Visual (mechanical)

1) ≤ 1 bar: reduces number of cycles until first service.
2) Maximum values depending on operating conditions and sealing materials.

 

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