Vacuum valve solutions for mass spectrometry or gas analysis are usually tailor-made. Based on selected VAT basic technologies, we develop the optimal solution for the specific application in terms of technical parameters such as conductance, tightness, actuation, degree of outgassing and freedom from particles, temperature resistance and foot print requirements. 

To learn more about how a VAT vacuum valve solution can help with specific mass spectrometry and gas analysis valve tasks, please select a specific product below.

Relevant series

01.0 Mini UHV Gate Valve
01.0 1 × 10-10 mbar to 2 bar (abs)

Mini UHV Gate Valve

The general purpose isolation valve for demanding applications
01.2 Mini Gate Valve
01.2 1 × 10-7 mbar to 1 bar (abs)

Mini Gate Valve

The general purpose isolation valve
08.1 Insertable Gate Valve
08.1 1 × 10-7 mbar to 1.6 bar (abs)

Insertable Gate Valve

Where installation space is limited (DN 63 - 100)
08.2 Insertable Gate Valve
08.2 1 × 10-7 mbar to 1.6 bar (abs)

Insertable Gate Valve

Where installation space is limited (DN 50)
10.8 UHV Gate Valve
10.8 1 × 10-10 mbar to 1.2 bar (abs)

UHV Gate Valve

The standard for UHV isolation
15.2 UHV Isolation Gate Valve
15.2 1 × 10-10 mbar to 1 bar (abs)

UHV Isolation Gate Valve

Exceptionally low shock and particle count
20.3 VATTERFLY Valve
20.3 1 × 10-8 mbar to 2 bar (abs)

VATTERFLY Valve

Reliable isolation in contaminating and aggressive vacuum processes
21.0 Butterfly Valve
21.0 1 × 10-8 mbar to 1.3 bar (abs)

Butterfly Valve

Reliable vacuum isolation in a compact design
21.1 Gas Dosing Valve
21.1 1 × 10-7 mbar to 4 bar (abs)

Gas Dosing Valve

Controlled, reproducible gas flow for vacuum chambers
21.3 Venting Valve
21.3 1 × 10-8 mbar to 1 bar (abs)

Venting Valve

Controlled venting of vacuum systems
21.4 Mini Angle / Inline Valve
21.4 1 × 10-8 mbar to 10 bar (abs)

Mini Angle / Inline Valve

Uncompromised reliability for sealing or venting without compressed air
24.4 Angle Valve
24.4 1 × 10-7 mbar to 5 bar (abs)

Angle Valve

Uncompromised reliability for large volume flows
24.5 Inline Valve
24.5 1 × 10-7 mbar to 5 bar (abs)

Inline Valve

Uncompromised reliability for large volume flows
26.4 HV Angle Valve
26.4 1 × 10-8 mbar to 5 bar (abs)

HV Angle Valve

Uncompromised flexibility and reliability
26.5 HV Inline Valve
26.5 1 × 10-8 mbar to 5 bar (abs)

HV Inline Valve

Uncompromised reliability
28.4 UHV Angle Valve
28.4 5 × 10-10 mbar to 5 bar (abs)

UHV Angle Valve

Outstandingly low outgassing performance
29.0 HV Angle Valve with Soft-Pump Function
29.0 1 × 10-8 mbar to 1.2 bar (abs)

HV Angle Valve with Soft-Pump Function

Pumping, venting without turbulence or pressure pulses (DN 25 - 80)
29.1 HV Inline Valve with Soft-Pump Function
29.1 1 × 10-8 mbar to 1.2 bar (abs)

HV Inline Valve with Soft-Pump Function

Pumping, venting without turbulence or pressure pulses
48.1 XHV All-Metal Gate Valve
48.1 XHV to 2 bar (abs)

XHV All-Metal Gate Valve

For high temperatures (DN 16, 40, 200, 250, 320)
48.2 XHV All-Metal Gate Valve
48.2 XHV to 2 bar (abs)

XHV All-Metal Gate Valve

For high temperature (DN 63, 100, 160)
54.1 UHV/XHV All-Metal Angle Valve - Easy Close
54.1 XHV to 2 bar (abs)

UHV/XHV All-Metal Angle Valve - Easy Close

For extreme UHV requirements
57.0 XHV All-Metal Angle Valve
57.0 XHV to 5 bar (abs)

XHV All-Metal Angle Valve

For extreme temperature and radiation requirements (DN 63 - 160)
57.1 XHV All-Metal Angle valve
57.1 XHV to 5 bar (abs)

XHV All-Metal Angle valve

For extreme temperature and radiation requirements (DN 10 - 40)
59.0 UHV All-Metal Variable Leak Valve
59.0 UHV to 10 bar (abs)

UHV All-Metal Variable Leak Valve

For extreme UHV requirements
62.7 Gas Dosing Valve
62.7 1 × 10-8 mbar to 2 bar (abs)

Gas Dosing Valve

Outstanding controllability of gas flows for vacuum chambers
62.8 HV Gas Dosing Valve
62.8 1 × 10-8 mbar to 3 bar (abs)

HV Gas Dosing Valve

Outstanding controllability of pressure in vacuum chambers through the gas flow
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