Vacuum Furnaces
In addition to the vacuum pumps used, the valve technology used in vacuum furnaces is decisive for process efficiency and quality. In addition to prec...
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62.7 Gas Dosing Valve
Outstanding Controllability of Gas Flows for Vacuum Chambers
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Reproducible Precision Over Exceptionally Large Pressure Ranges
The main requirements of a modern automated gas dosing valve are the degree of its controllability as well as its ability to reliably and precisely follow a predefined flow setting. The 62.7 Gas Dosing Valve series delivers both.
The 62.7 series is driven by an electromagnetic actuator with DN 5 mm (3/16") connections and is able to control the pressure within 2 decades in a range from < 1 x 10-8 mbar to 2 bar to a very fine degree. This means the flow characteristic from the initial opening to full conductance can be fully controlled at any pressure level. Not only does this mean that the 62.7 series is outstanding in its operational range, providing just one valve solution where normally several different valves would be needed. The series also provides unprecedented controllability. The special isolation and controlling system of the 62.7, an aperture and plate mechanism for the DN 5 allow very smooth opening characteristics that avoid any pressure change peaks even at very low conductance.
The chosen flow characteristic can be defined via a fixed setting or they can be operated in a dynamic setting where the 62.7 is connected via its controller to a pressure sensor in the process.
Tested in thousands of demanding applications under various process conditions, the 62.7 series has proven its outstanding performance.
DN 5
The 62.7 Gas Dosing Valve is available in stainless steel with customer specific flanges for DN 5. Gas flow characteristics can be directly defined on the external valve pressure controller via PC connection or via integration in a production process control unit (PCU).
Key features of the 62.7 Gas Dosing Valve
Features:
- Outstanding wide flow control range
- Outstanding controllability at very small conductance
- Integrated power failure shut-off function
Benefits:
- Outstanding process controllability
- One valve solution for different pressure regimes
- Excellent reliability and lifetime
- Low cost of ownership
Technical data
| DN 5 mm (3⁄16") | ||
|---|---|---|
| Actuator | Electromagnetic | |
| Body Material | Stainless Steel | |
| Feedthrough | Shaft Feedthrough | |
| Standard Flanges | Specific | |
| Leak Rate | Valve Body, Valve Seat | < 1 × 10-9 mbar ls-1 |
| Pressure Range | Inlet Outlet |
< 1 × 10-8 mbar to 2 bar (abs) < 1 × 10-8 mbar to 1 bar (abs) |
| Temperature | Ambient | 5 °C– 50°C |
| Material | Valve Body Plate |
AISI 316L (1.4404 or 1.4435) AISI 430IL (1.4105IL) |
| Seal | Plate | FPM |
| Mounting Position | Any | |
| Controllable Conductance | 100 sccm, 500 sccm, 1000 sccm, 5000 sccm | |
| Operating Time | Closing / Opening | < 30 ms / < 30 ms |
| Control | Analog 0 - 10VDC (max. 100 mA) | |
| Weight | 0.096 kg / 0.2 lbs |
