Semiconductor Production

With constantly evolving processes and the increasing complexity of cutting-edge fabs, semiconductor manufacturing is a relentless cycle of innovation. Because the presence of particles no bigger than a molecule can ruin a semiconductor chip – and reduce yields – vacuum valves must provide uncompromising performance in terms of particle avoidance (to avoid wafer damage) and reliability.

This rapid pace of innovation leaves semiconductor manufacturers only a limited time to amortize investments and reduce production costs. VAT vacuum valve solutions help deliver quicker valve performance, extended tool uptime, lower cost of operations – for a faster return on investment.

To find out more about how a VAT vacuum valve solution can address semiconductor production issues, please select your specific application below.

VAT Group AG Annual General Meeting 2025: Shareholders approved all Board proposals and unchanged dividend of CHF 6.25 per share

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VAT publishes its Sustainability Report 2024

Semiconductor Production

Process Control & Isolation

Substrate Transfer

Sub-Fab Systems