Semiconductor Production

With constantly evolving processes and the increasing complexity of cutting-edge fabs, semiconductor manufacturing is a relentless cycle of innovation. Because the presence of particles no bigger than a molecule can ruin a semiconductor chip – and reduce yields – vacuum valves must provide uncompromising performance in terms of particle avoidance (to avoid wafer damage) and reliability.

This rapid pace of innovation leaves semiconductor manufacturers only a limited time to amortize investments and reduce production costs. VAT vacuum valve solutions help deliver quicker valve performance, extended tool uptime, lower cost of operations – for a faster return on investment.

To find out more about how a VAT vacuum valve solution can address semiconductor production issues, please select your specific application below.

SEMICON/FPD China 2025

VAT media release on full-year 2024 results

Silicon carbide: An exclusive: semiconductors on the move to mainstream

VAT Media Release on Q4 and FY 2024 Preliminary Results

Semiconductor Production

Process Control & Isolation

Substrate Transfer

Sub-Fab Systems