The VAT vacuum valve portfolio for thin film coating processes is designed for precise, stable operation even under changing process conditions. Key features include precise gas flow control even at low conductance levels, minimized residual gas and particulate emissions, and a modular design that allows the required vacuum valves to be optimally configured to meet specific process requirements.

To learn more about how a VAT vacuum valve solution can solve challenges in thin film coating processes, please select from the products below.

 

Relevant series

04.2 HV Transfer Valve with L-VAT
04.2 1 × 10-9 mbar to 1.2 bar (abs)

HV Transfer Valve with L-VAT

For load lock and process chamber isolation
05.3 HV Transfer Valve Insert with L-MOTION
05.3 1 × 10-9 mbar to 1.1 bar (abs)

HV Transfer Valve Insert with L-MOTION

Fast and precise, particularly suited to corrosive processes
06.1 Large Transfer Valve / Insert with TWINVAT
06.1

Large Transfer Valve / Insert with TWINVAT

High performance for display production systems
06.3 Large Transfer Valve / Insert with TWINVAT
06.3

Large Transfer Valve / Insert with TWINVAT

High performance for display production systems - atmospheric pressure version
06.6 Large Transfer Valve / Insert / Door with SOLVAT
06.6

Large Transfer Valve / Insert / Door with SOLVAT

High performance for PV and large coating systems
06.8 Large Transfer Valve / Insert / Door with FLAPVAT
06.8

Large Transfer Valve / Insert / Door with FLAPVAT

High performance for PV and large coating systems
07.0 HV Transfer Door Insert with LINVAT
07.0 1 × 10-10 mbar to 1 bar (abs)

HV Transfer Door Insert with LINVAT

High performance for EFEM and load lock applications
10.8 UHV Gate Valve
10.8 1 × 10-10 mbar to 1.2 bar (abs)

UHV Gate Valve

The standard for UHV isolation
12.1 Gate Valve
12.1 1 × 10-7 mbar to 1.6 bar (abs)

Gate Valve

The standard for vacuum isolation
14.0 HV Gate Valve
14.0 1 × 10-8 mbar to 2 bar (abs)

HV Gate Valve

For standard high cycle vacuum isolation
15.0 Isolation Gate Valve
15.0 1 × 10-7 mbar to 1 bar (abs)

Isolation Gate Valve

Exceptionally low shock and particle count
15.1 HV Isolation Gate Valve
15.1 1 × 10-8 mbar to 1 bar (abs)

HV Isolation Gate Valve

Exceptionally low shock and particle count
15.2 UHV Isolation Gate Valve
15.2 1 × 10-10 mbar to 1 bar (abs)

UHV Isolation Gate Valve

Exceptionally low shock and particle count
16.8 Large HV Pendulum Isolation Valve
16.8 1 × 10-8 mbar to 1.2 bar (abs)

Large HV Pendulum Isolation Valve

Compact design for large vacuum flows and harsh conditions
20.3 VATTERFLY Valve
20.3 1 × 10-8 mbar to 2 bar (abs)

VATTERFLY Valve

Reliable isolation in contaminating and aggressive vacuum processes
21.1 Gas Dosing Valve
21.1 1 × 10-7 mbar to 4 bar (abs)

Gas Dosing Valve

Controlled, reproducible gas flow for vacuum chambers
21.3 Venting Valve
21.3 1 × 10-8 mbar to 1 bar (abs)

Venting Valve

Controlled venting of vacuum systems
21.4 Mini Angle / Inline Valve
21.4 1 × 10-8 mbar to 10 bar (abs)

Mini Angle / Inline Valve

Uncompromised reliability for sealing or venting without compressed air
24.4 Angle Valve
24.4 1 × 10-7 mbar to 5 bar (abs)

Angle Valve

Uncompromised reliability for large volume flows
24.5 Inline Valve
24.5 1 × 10-7 mbar to 5 bar (abs)

Inline Valve

Uncompromised reliability for large volume flows
25.0 HV Cylinder Valve (Angle Version)
25.0 1 × 10-8 mbar to 3 bar (abs)

HV Cylinder Valve (Angle Version)

Maximum conductance for harsh process environments
26.4 HV Angle Valve
26.4 1 × 10-8 mbar to 5 bar (abs)

HV Angle Valve

Uncompromised flexibility and reliability
26.5 HV Inline Valve
26.5 1 × 10-8 mbar to 5 bar (abs)

HV Inline Valve

Uncompromised reliability
28.4 UHV Angle Valve
28.4 5 × 10-10 mbar to 5 bar (abs)

UHV Angle Valve

Outstandingly low outgassing performance
29.0 HV Angle Valve with Soft-Pump Function
29.0 1 × 10-8 mbar to 1.2 bar (abs)

HV Angle Valve with Soft-Pump Function

Pumping, venting without turbulence or pressure pulses (DN 25 - 80)
29.1 HV Inline Valve with Soft-Pump Function
29.1 1 × 10-8 mbar to 1.2 bar (abs)

HV Inline Valve with Soft-Pump Function

Pumping, venting without turbulence or pressure pulses
59.0 UHV All-Metal Variable Leak Valve
59.0 UHV to 10 bar (abs)

UHV All-Metal Variable Leak Valve

For extreme UHV requirements
61.3 HV Butterfly Control Valve
61.3 1 × 10-8 mbar to 1.2 bar (abs)

HV Butterfly Control Valve

Fast, precise downstream pressure control
61.6 HV Butterfly Control and Isolation Valve
61.6 1 × 10-8 mbar to 1.2 bar (abs)

HV Butterfly Control and Isolation Valve

Fast, precise downstream pressure control and isolation
61.7 HV Butterfly Control Valve
61.7 1 × 10-6 mbar to 1.2 bar (abs)

HV Butterfly Control Valve

Outstanding controllability with exceptionally low conductance
62.0 HV Angle Control Valve
62.0 1 × 10-8 mbar to 1.4 bar (abs)

HV Angle Control Valve

The high pressure and high temperature solution
62.7 Gas Dosing Valve
62.7 1 × 10-8 mbar to 2 bar (abs)

Gas Dosing Valve

Outstanding controllability of gas flows for vacuum chambers
62.8 HV Gas Dosing Valve
62.8 1 × 10-8 mbar to 3 bar (abs)

HV Gas Dosing Valve

Outstanding controllability of pressure in vacuum chambers through the gas flow
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