
SEMICON/FPD China 2025
Discuss with us our latest technology updates. Meet us March 26-28, in Shanghai at the New Int'l Expo Center, Hall N1, VAT booth 1371.
The volume manufacturing of multilayer stacks with dry etching processes requires optimal sealing technology (with self-cleaning function) and an overall robust tool design for high uptime. VAT vacuum valve solutions provide innovative functionality to ensure increased process safety and enhanced tool uptime.
To find out more about how a VAT vacuum valve solution can help to address dry etching process issues, please select from the products listed below.