
SEMICON/FPD China 2025
Discuss with us our latest technology updates. Meet us March 26-28, in Shanghai at the New Int'l Expo Center, Hall N1, VAT booth 1371.
Reliability and Efficiency
A number of valve solutions are generally required for vacuum drying. In addition to isolation and control valves in the downstream area, venting valves and, in automated inline drying systems, transfer valves for loading and unloading process chambers are important.
The VAT vacuum valve portfolio for vacuum drying includes a range of valve series that are characterized by their high reliability, with high uptime with only very low maintenance requirements.
To learn more about how a VAT vacuum valve solution can solve vacuum drying challenges, please select one of the products below.