Sub-Fab Systems
Sub-fab processes can be challenging: corrosive, abrasive, and toxic gases and/or condensation and high levels of by-products in the gas stream can al...
Read more
Feb 11, 2026
Events
25.7 HV Quick Shut-Off Valve
Specify your product
Reliable high-speed protection
The main requirement of a modern shut-off valve is its reliable and fast acting emergency isolation on any backflow event. The 25.7 is designed to provide a sensitive, high-speed isolation function that reliably prevents the risk of backflow into a process chamber or pipe system.
The 25.7 HV Quick Shut-Off Valve is flow controlled. The direct operating design without any subsystem (sensor and actuator) provides high-speed isolation with low complexity and low failure risk. With less than 10 milliseconds from the initial backflow impulse to full isolation the 25.7 leads its class.
To operate the 25.7 as the spec-sheet, a shut-off valve should ideally add no conductance barrier to the system. The 25.7’s special flow-optimized design sets the standard in this regard, delivering a perfect balance between high conductance and fast isolation.
When used in processes with by-products in the gas stream, e.g. foreline applications, any accumulation of contamination on a quick shut-off valve reduces conductance and can negatively influence its isolation capabilities. This process related challenge is addressed by a special surface coating which minimizes accumulation for most by-products significantly. An additional heating option is available to avoid process gas condensation at the valve surface.
open
emergency closure in case of backflow
closed
The 25.7 HV Quick Shut-Off Valve is currently available in sizes from DN 100 - 160mm (4“ - 6”). The valve body is made of stainless steel. The standard flange is ISO-K.
For applications with very aggressive process gases, FFKM seals are available.
Key features of the 25.7 HV Quick Shut-Off Valve
Features:
- Flow-controlled movement
- Outstandingly fast reaction time
- Optimized conductance
- Special surface coating to minimize by-product contamination
Benefits:
- High level of protection
- Extended lifetime
- Easy installation
- Low cost of ownership
- Technical data
| Sizes | DN 100 (4"), DN 160 (6") | ||
|---|---|---|---|
| Body material | Stainless steel | ||
| Standard flanges | ISO-K | ||
| Leak rate | Valve body valve seat |
< 1 × 10-9 mbar ls-1 < 1 × 10-6 mbar ls-1 |
|
| Pressure range | Vacuum to 1.2 bar (abs) | ||
| Differential pressure | On the gate | ≤ 1 bar | |
| Conductance (laminar flow) | DN 100 DN 160 |
6000 ls-1 |
|
| Cycles until first service | recommended after each backflow event or with regular maintenance cycles |
||
| Temperature | Valve body | ≤ 200 °C | |
| Heating and cooling rate | ≤ 50 °C h-1 | ||
| Material | Valve body gate |
AISI 304 (1.4301) AISI 304 (1.4301) |
|
| Seal | Bonnet gate |
FKM FKM |
|
| Mounting position | For line installation vertical only gate facing chamber |
||
| Trigger pressure | ΔP at the gate | ≥ 5 mbar | |
| Closing time | Gate move time DN 100 DN 160 |
≤ 10 ms ≤ 15 ms |
|
| Weight |
DN 100 |
3.7 kg / 8.16 lbs 6.3 kg / 13.9 lbs |
|