Back to Product Configuration

Series

65.3 HV Pendulum Control Valve

  • 65.3 - 65351-JHUK
65.3 - 65351-JHUK

Series

65.3 HV Pendulum Control Valve

Article number
65351-JHUK
1 × 10-8 mbar to 1.2 bar (abs)

Optimized downstream pressure control & vacuum isolation in SEMI & display systems

  • Technical data
  • Downloads
Size
DN 350 (14")
Flange
JIS
Material
Aluminum hard anodized
Actuator
Stepper motor
Controller Configuration
PFO and VC master
Position Indication Signal
No
Solenoid
No
Pressure Min.
1 × 10-6 mbar
Pressure Max.
1.2 bar (abs)
Conductance
43000 ls⁻¹
Differential Pressure on Plate
≤ 1 bar
Differential Pressure at opening
≤ 1 bar
Controller interface + sensors
RS485 / 2 sensors
Close to open
6 s
Open to close
5 s
Pressure control (throttling) fast speed
0.7 s
Pressure control (throttling) default speed
1.3 s
Max. compressed air pressure
7 bar / 102 psi
Min. compressed air pressure
4 bar / 58 psi
Weight
59 kg / 130.07 lbs
Max. temperature valve body
≤ 120 °C
Add-Ons for Your Product
Valve
Temperature Management
Actuator
Gate

65.3 HV Pendulum Control Valve 65351-JHUK Product Datasheet

PDF 254.95 KB

65.3 HV Pendulum Control Valve 65351-JHUK 3D CAD File

ZIP 576.15 KB

65.3 HV Pendulum Control Valve 65351-JHUK 2D Dimension Drawing

PDF 832.24 KB

Spare parts

Please specify your spare part need at the end of your selection process, on the next page.

Request for quote