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Series

65.3 HV Pendulum Control Valve

  • 65.3 - 65350-PHAF
65.3 - 65350-PHAF

Series

65.3 HV Pendulum Control Valve

Article number
65350-PHAF

Optimized Downstream Pressure Control & Vacuum Isolation in SEMI & Display Systems

  • Technical data
  • Downloads
Size
DN 320 (12")
Flange
ISO-F
Material
Aluminum hard anodized
Actuator
Stepper motor
Controller Configuration
SPS
Position Indication Signal
No
Solenoid
No
Pressure Min.
1 × 10-6 mbar
Pressure Max.
1.2 bar (abs)
Conductance
30000 ls⁻¹
Differential Pressure on Plate
≤ 1 bar
Differential Pressure at opening
≤ 1 bar
Controller interface + sensors
Profibus / 2 sensors
Close to open
6 s
Open to close
5 s
Pressure control (throttling) fast speed
0.6 s
Pressure control (throttling) default speed
1.1 s
Max. compressed air pressure
7 bar / 102 psi
Min. compressed air pressure
4 bar / 58 psi
Weight
48 kg / 105.82 lbs
Max. temperature valve body
≤ 120 °C
Add-Ons for Your Product
Valve
Temperature Management
Actuator
Gate

65.3 HV Pendulum Control Valve 65350-PHAF Product Datasheet

PDF 254.95 KB

65.3 HV Pendulum Control Valve 65350-PHAF 3D CAD File

ZIP 685.36 KB

65.3 HV Pendulum Control Valve 65350-PHAF 2D Dimension Drawing

PDF 822.26 KB

Spare parts

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