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Series

65.3 HV Pendulum Control Valve

  • 65.3 - 65348-PHUQ
65.3 - 65348-PHUQ

Series

65.3 HV Pendulum Control Valve

Article number
65348-PHUQ

Optimized Downstream Pressure Control & Vacuum Isolation in SEMI & Display Systems

  • Technical data
  • Downloads
Size
DN 250 (10")
Flange
ISO-F
Material
Aluminum hard anodized
Actuator
Stepper motor
Controller Configuration
PFO and VC master
Position Indication Signal
No
Solenoid
No
Pressure Min.
1 × 10-6 mbar
Pressure Max.
1.2 bar (abs)
Conductance
22000 ls⁻¹
Differential Pressure on Plate
≤ 1 bar
Differential Pressure at opening
≤ 1 bar
Controller interface + sensors
DeviceNet / 2 sensors
Close to open
4 s
Open to close
3 s
Pressure control (throttling) fast speed
0.5 s
Pressure control (throttling) default speed
0.9 s
Max. compressed air pressure
7 bar / 102 psi
Min. compressed air pressure
4 bar / 58 psi
Weight
29 kg / 64 lbs
Max. temperature valve body
≤ 120 °C
Add-Ons for Your Product
Valve
Temperature Management
Actuator
Gate

65.3 HV Pendulum Control Valve 65348-PHUQ Product Datasheet

PDF 254.95 KB

65.3 HV Pendulum Control Valve 65348-PHUQ 2D Dimension Drawing

PDF 845.13 KB

65.3 HV Pendulum Control Valve 65348-PHUQ 3D CAD File

ZIP 679.17 KB

Spare parts

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