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Series

65.3 HV Pendulum Control Valve

  • 65.3 - 65348-PAHQ
65.3 - 65348-PAHQ

Series

65.3 HV Pendulum Control Valve

Article number
65348-PAHQ
1 × 10-8 mbar to 1.2 bar (abs)

Optimized downstream pressure control and vacuum isolation in SEMI and display systems

  • Technical data
  • Downloads
Size
DN 250 (10")
Flange
ISO-F
Material
Aluminum
Actuator
Stepper motor
Controller interface + sensors
DeviceNet / 2 sensors
Controller configuration
PFO
Position indication signal
No
Solenoid
No
Pressure min.
1 × 10-8 mbar
Pressure max.
1.2 bar (abs)
Conductance
22000 ls⁻¹
Differential pressure on plate
≤ 1 bar
Differential pressure at opening
≤ 1 bar
Close to open
4 s
Open to close
3 s
Pressure control (throttling) fast speed
0.5 s
Pressure control (throttling) default speed
0.9 s
Max. compressed air pressure
7 bar / 102 psi
Min. compressed air pressure
4 bar / 58 psi
Weight
29 kg / 64 lbs
Max. temperature valve body
≤ 120 °C
Add-Ons for Your Product
Valve
Temperature management
Actuator
Gate

65.3 HV Pendulum Control Valve 65348-PAHQ Product Datasheet

PDF 254.95 KB

65.3 HV Pendulum Control Valve 65348-PAHQ 2D Dimension Drawing

PDF 845.13 KB

65.3 HV Pendulum Control Valve 65348-PAHQ 3D CAD File

ZIP 679.17 KB

Spare parts

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