Sep 17, 2026
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97.0 Load Lock
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Optimal performance and throughput
The Load Lock is a key interface between atmospheric wafer handling and high-vacuum process modules in semiconductor manufacturing. It ensures controlled wafer transfer while maintaining contamination isolation and stable process conditions.
Our Load Lock concept is based on a highly integrated architecture, where valve functionality is embedded directly into the chamber design. This minimizes external interfaces, reduces dead volume, and improves conductance, enabling faster pump-down and vent cycles. The result is shorter cycle times and increased tool throughput, while maintaining precise and repeatable vacuum conditions.
The integrated design reduces system footprint and simplifies overall tool architecture. By combining vacuum isolation, transfer, and venting / pumping functions within a compact chamber solution, the Load Lock supports efficient operation, improved uptime, and robust performance under high-cycle conditions.
Our VAT Load Locks are designed for demanding semiconductor applications and can be adapted through various configurations in chamber layout, valve integration, surface treatments, and interfaces to meet specific process and tool requirements.
Key features of the 97.0 Load Lock
Features:
- Highly integrated architecture
- Highly customizable
- Vacuum isolation combined
Benefits:
- Reduction of external interfaces, system footprint, and dead volume
- Improvement of conductance, enabling faster pump-down and vent cycles.
- Easy implementation of additional features (heating, cooling and others)
- Improvement of uptime and throughput
