The 13.0 HV Isolation Valve with L-Gate has been specifically designed for electron gun isolation, for example, in electron microscopes. More broadly, it provides a suitable solution for applications requiring extremely low particle generation.
The series is designed for vacuum isolation at various pressure levels up to 1 × 10-9 mbar. The isolation function in this series is achieved through L-Gate technology, which incorporates a profile similar to the L-Motion profile. The technology provides reliable gate sealing without any friction, minimizing the risk of particle generation. Furthermore, the L-Gate technology enables a very gentle “soft-touch” closing. This soft-touch motion avoids any closing shock typically generated by standard valves when the gate touches the gate seat during the closing movement.
Another key feature is the vulcanized gate seal, which is a highly reliable and more durable sealing solution than a standard O-ring sealing. An additional benefit is its superior outgassing performance. Already installed in several demanding applications, 13.0 HV Isolation Valve with L-Gate has proven its outstanding reliability under various process conditions.
Various design options and customizations allow integration into different systems. Further material selection options enable this solution to meet a wide range of application requirements.
13.0 HV Isolation Valve with L-Gate
Closed
Optically Closed
Open
The 13.0 HV Isolation Valve with L-Gate is available with single- or double-acting pneumatic actuation with solenoid valves, either as an onboard solution or for external mounting. Mechanical and / or electrical position indicators show the valve position.
The standard gate sealing material is vulcanized FKM. This prevents sticking and extends the service life. Other sealing materials are available on request.
L-Gate technology to avoid any friction and minimize shock
Welded metal bellows sealed feedthrough
Extreme low particle count
| Sizes | DN 6.3 mm (0.25"), DN 8 mm (0.31"), DN 10 mm (0.39"), DN 12 mm (0.47"), DN 16 mm (0.63"), DN 63 mm (2½"), DN 80 mm (3"), DN 100 mm (4"), DN 160 mm (6") |
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|---|---|---|---|
| Actuators | Pneumatic | Single-acting with closing spring or double-acting | |
| Body material | Aluminum | ||
| Feedthrough | Bellows | ||
| Standard flanges | Customized flange | ||
| Vacuum level | HV | ||
| Leak rate | Valve body Valve seat |
< 1 × 10-9 mbar ls-1 < 1 × 10-9 mbar ls-1 |
|
| Pressure range | 1 × 10-9 mbar to 1 bar (abs) | ||
| Differential pressure on the gate | ≤ 1.0 bar | ||
| Differential pressure at opening | ≤ 30 mbar1) | ||
| Cycles until first service | Standard configuration Customized configuration |
50 000 On request |
|
| Temperature2) | Valve body Actuator Solenoid valve Position indicator |
≤ 120 °C ≤ 50 °C ≤ 50 °C ≤ 50 °C |
|
| Heating and cooling rate | ≤ 30 °C h-1 | ||
| Material |
Aluminum valve body |
EN AW-5083 (3.3547) AISI 316L (1.4435) Titanium AISI 316L (1.4435) |
|
| Seal | Insert connection Gate |
FKM FKM |
|
| Mounting position | Any | ||
| Solenoid valve | 24 VDC, 5.4 W (others on request) | ||
| Position indicator: contact rating | On request: depending on valve size | ||
| Valve position indication | Visual (mechanical) | ||
1) ≤ 1 bar: reduces number of cycles until first service.
2) Maximum values depending on operating conditions and sealing materials.
