CVD

The chemical vapor deposition (CVD) processes are used e.g. for thin-film encapsulations to ensure the durability of a display and protect it from environmental influences. CVD processes must be run under controlled atmospheric conditions that require precise control of gas flows and pressure conditions in the process chamber. VAT vacuum and gas dosing valves for CVD processes are specially designed for these conditions.

Precision & durability

VAT vacuum and gas dosing valves for CVD processes offer not only very precise control and but also high resistance in contact with aggressive media. This increases production quality and availability, and thus overall profitability.

To learn more about how a VAT vacuum valve solution can help solve CVD challenges, please select from the products listed below.