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Series

65.3 HV Pendulum Control Valve

  • 65.3 - 65340-JAWQ
65.3 - 65340-JAWQ

Series

65.3 HV Pendulum Control Valve

Article number
65340-JAWQ
1 × 10-8 mbar to 1.2 bar (abs)

Optimized Downstream Pressure Control & Vacuum Isolation in SEMI & Display Systems

  • Technical data
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Size
DN 100 (4")
Flange
JIS
Material
Aluminum
Actuator
Stepper motor
Controller interface + sensors
DeviceNet / 2 sensors
Controller Configuration
SPS, PFO and VC master
Position Indication Signal
No
Solenoid
No
Pressure Min.
1 × 10-8 mbar
Pressure Max.
1.2 bar (abs)
Conductance
80 ls⁻¹
Differential Pressure on Plate
≤ 1 bar
Differential Pressure at opening
≤ 1 bar
Close to open
4 s
Open to close
3 s
Pressure control (throttling) fast speed
0.4 s
Pressure control (throttling) default speed
0.7 s
Weight
12.5 kg / 27.56 lbs
Max. temperature valve body
≤ 120 °C
Add-Ons for Your Product
Valve
Temperature Management
Actuator
Gate

65.3 HV Pendulum Control Valve 65340-JAWQ 2D Dimension Drawing

PDF 854.57 KB

65.3 HV Pendulum Control Valve 65340-JAWQ 3D CAD File

ZIP 579.71 KB

65.3 HV Pendulum Control Valve 65340-JAWQ Product Datasheet

PDF 254.95 KB

Spare parts

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