Choose correct control algorithm

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Choose correct control algorithm

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System Configuration

Constant gas flow available

Constant gas flow not available

Tv*<= 500 sec

Tv* > 500 sec

DownstreamPicture

Adaptive

PI

UpstreamPicture

PI

Soft Pump

Soft Pump

 

* Use the formula below to define the applicable pressure control algorithm.

 

 

qL        gasflow for learn [mbarl/s]

pSFS        sensor full scale pressure [mbar]

Tv*        Vacuum time constant [sec]

CV        Chamber Volume [l]