# PKW parameter list

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Number [HEX] | Name | Index [HEX] | Data Type | Min | Max | Default | Access | Non Volatile | Unit | Notes
E6 | SENSOR OPERATION MODE | 0 | UINT8 | 0 | 4 | 1 | RW | 1 |  | Pressure source for pressure control 0 = no sensor 1 = sensor 1 2 = both sensors (sensor 1 high, sensor 2 low) 3 = sensor 2 4 = both sensors (sensor 2 high, sensor 1 low)
E7 | SENSOR FULL SCALE RATIO | 0 | FLOAT32 | 1.0 | 1000.0 | 10.0 | RW | 1 |  | Full scale ratio between high sensor and low sensor Refer to chapter: «Valve and sensor configuration»
F4 | SENSOR 1 FULL SCALE | 0 | FLOAT32 | 1.0E-6 | 1.0E+6 | 1000.0 | RW | 1 |  | Full scale value of sensor 1
F5 | SENSOR 1 UNIT | 0 | UINT8 | 0 | 8 | 4 | RW | 1 |  | Pressure unit of SENSOR 1 FULL SCALE 0 = Pa 1 = bar 2 = mbar 3 = ubar 4 = Torr 5 = mTorr 6 = atm 7 = psi 8 = psf
FA | SENSOR 1 OFFSET VALUE (Sensor offset value (Sensor Adjust, Zero)) | 0 | FLOAT32 | -1.4 | 1.4 | 0 | RW | 1 |  | Voltage value in [Volt]
FE | SENSOR 1 RAW VALUE (ADC measurement value on the sensor input) | 0 | FLOAT32 | - | - | - | RO | 0 |  | Voltage value in [Volt]
104 | SENSOR 2 FULL SCALE | 0 | FLOAT32 | 1.0E-6 | 1.0E+6 | 100.0 | RW | 1 |  | Full scale value of sensor 2
105 | SENSOR 2 UNIT | 0 | UINT8 | 0 | 8 | 4 | RW | 1 |  | Pressure unit of SENSOR 2 FULL SCALE 0 = Pa 1 = bar 2 = mbar 3 = ubar 4 = Torr 5 = mTorr 6 = atm 7 = psi 8 = psf
10A | SENSOR 2 OFFSET VALUE (Sensor offset value (Sensor Adjust, Zero)) | 0 | FLOAT32 | -1.4 | 1.4 | 0 | RW | 1 |  | Voltage value in [Volt]
10E | SENSOR 2 RAW VALUE (ADC measurement value on the sensor input) | 0 | FLOAT32 | - | - | - | RO | 0 |  | Voltage value in [Volt]
116 | LEARN METHOD | 0 | UINT8 | 0 | 2 | 0 | RW | 0 |  | 0 = standard 1 = short 2 = calculated
117 | LEARN OPEN SPEED | 0 | UINT16 | 1 | 1000 | 1000 | RW | 1 |  | Open speed during learn process 1: lowest speed 1000: full speed
118 | LEARN PRESSURE MAXIMUM | 0 | UINT16 | 0 | 1000 | 1000 | RW | 0 |  | Pressure limit during learn process. In ‰ of sensor full scale (high range sensor)
119 | LEARN STATE | 0 | UINT16 | 0x0000 | 0xFFFF | 0x0000 | RO | 0 |  | Warnings. See table below
122 | LEARN CHAMBER VOLUME | 0 | FLOAT32 | 0.1 | 1.0E+6 | 50.0 | RW | 1 | liter | For short and calculated learn
123 | LEARN PUMPING SPEED | 0 | FLOAT32 | 0.1 | 1.0E+5 | 1.0 | RW | 0 | liter/sec | Output of short learn Input for calculated learn
124 | LEARN GAS FLOW VALUE | 0 | FLOAT32 | 1.0 E-9 | 1.0 E+9 | 100.0 | RW | 0 |  | For short learn
125 | LEARN GAS FLOW UNIT | 0 | UINT8 | 0 | 7 | 5 | RW | 0 |  | Unit of LEARN GAS FLOW VALUE 0 = pa m3 s-1 1 = mbar l s-1 2 = Torr l s-1 3 = Atm cm3 s-1 4 = luesec 5 = sccm 6 = slm 7 = mol s-1
190 | VALVE SPEED | 0 | UINT16 | 1 | 1000 | 1000 | RW | 1 |  | Valve speed during position and pressure control 1: lowest speed 1000: full speed
199 | PRESSURE CONTROL ALGORITHM | 0 | UINT8 | 0 | 3 | 0 | RW | 0 |  | 0 = adaptive downstream 1 = fixed 1 2 = fixed 2 3 = soft pump Refer to pressure control configuration
19A | SENSOR DELAY (ADAPTIVE DOWNSTREAM) | 0 | FLOAT32 | 0.0 | 1.0 | 0.0 | RW | 0 | sec |
19B | RAMP TIME (ADAPTIVE DOWNSTREAM) | 0 | FLOAT32 | 0.0 | 1.0E+6 | 0.0 | RW | 0 | sec |
19C | RAMP TIME MODE (ADAPTIVE DOWNSTREAM) | 0 | UINT8 | 0 | 1 | 0 | RW | 0 |  | 0 = time from actual pressure to target pressure. 1 = time from 0 to SFS (constant slope)
19E | GAIN FACTOR (ADAPTIVE DOWNSTREAM) | 0 | FLOAT32 | 0.0001 | 7.5 | 1.0 | RW | 0 |  |
19F | RAMP TYPE (ADAPTIVE DOWNSTREAM) | 0 | UINT8 | 0 | 1 | 0 | RW | 0 |  | 0 = linear, 1 = logarithmic
1A5 | RAMP TIME (FIXED 1) | 0 | FLOAT32 | 0.0 | 1.0E+6 | 0.0 | RW | 0 | sec |
1A6 | RAMP TIME MODE (FIXED 1) | 0 | UINT8 | 0 | 1 | 0 | RW | 0 |  | 0 = time from actual pressure to target pressure. 1 = time from 0 to SFS (constant slope)
1A7 | CONTROL DIRECTION (FIXED 1) | 0 | UINT8 | 0 | 1 | 0 | RW | 0 |  | 0 = downstream, 1 = upstream
1A8 | P-GAIN (FIXED 1) | 0 | FLOAT32 | 0.001 | 100.0 | 0.1 | RW | 0 |  |
1A9 | I-GAIN (FIXED 1) | 0 | FLOAT32 | 0.0 | 100.0 | 0.1 | RW | 0 |  |
1AA | RAMP TYPE (FIXED 1) | 0 | UINT8 | 0 | 1 | 0 | RW | 0 |  | 0 = linear, 1 = logarithmic
1AF | RAMP TIME (FIXED 2) | 0 | FLOAT32 | 0 | 1.0E+6 | 0.0 | RW | 0 | sec |
1B0 | RAMP TIME MODE (FIXED 2) | 0 | UINT8 | 0 | 1 | 0 | RW | 0 |  | 0 = time from actual pressure to target pressure. 1 = time from 0 to SFS (constant slope)
1B1 | CONTROL DIRECTION (FIXED 2) | 0 | UINT8 | 0 | 1 | 0 | RW | 0 |  | 0 = downstream, 1 = upstream
1B2 | P-GAIN (FIXED 2) | 0 | FLOAT32 | 0.001 | 100.0 | 0.1 | RW | 0 |  |
1B3 | I-GAIN (FIXED 2) | 0 | FLOAT32 | 0.0 | 100.0 | 0.1 | RW | 0 |  |
1B4 | RAMP TYPE (FIXED 2) | 0 | UINT8 | 0 | 1 | 0 | RW | 0 |  | 0 = linear, 1 = logarithmic
1B9 | RAMP TIME (SOFT PUMP) | 0 | FLOAT32 | 0.0 | 1.0E+6 | 0.0 | RW | 0 | sec |
1BA | RAMP TIME MODE (SOFT PUMP) | 0 | UINT8 | 0 | 1 | 0 | RW | 0 |  | 0 = time from actual pressure to target pressure. 1 = time from 0 to SFS (constant slope)
1BC | P-GAIN (SOFT PUMP) | 0 | FLOAT32 | 0.001 | 100.0 | 0.1 | RW | 0 |  |
1BD | I-GAIN (SOFT PUMP) | 0 | FLOAT32 | 0.0 | 100.0 | 0.1 | RW | 0 |  |
1BE | RAMP TYPE (SOFT PUMP) | 0 | UINT8 | 0 | 1 | 0 | RW | 0 |  | 0 = linear, 1 = logarithmic
258 | RESET VALVE | 0 | UINT8 | 0 | 1 | 0 | RW | 0 |  | 1 = reset
25D | RESET SERVICE REQUEST FLAG | 0 | UINT8 | 0 | 1 | 0 | RW | 0 |  | 1 = reset
26C | CONTROLLER FIRMWARE VERSION | 0 | STRING |  |  |  | RO | 1 |  |
280 | FIELDBUS ADDRESS | 0 | UINT32 | 0 | 255 | 0 | RW | 1 |  |
290 | TIME SINCE POWER ON | 0 | UINT32 | 0 | 232 - 1 | 0 | RO | 0 | sec |
291 | TOTAL TIME POWERED | 0 | UINT32 | 0 | 232 - 1 | 0 | RO | 1 | sec |
36B0 | PLASMA MODE DURATION | 0 | FLOAT32 | 0.01 | 30.0 | 1.5 | RW | 1 | sec |
36B1 | PLASMA MODE FILTER TIME | 0 | FLOAT32 | 0.01 | 30.0 | 4.0 | RW | 1 | sec |

Setting of ‘Non volatile’ for control parameter is settable by s:02Z10x. It can be read out by "i:02Z10"

FLOAT32 is in IEE754 Format